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Schematic diagram of the PEALD process of the (a) STD, (b) R-S…
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(a) Schematic diagram of the Al…
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Schematic of sputtered Pt/PEALD TiN/PEAL…
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PEALD process parameters for SiO2:HfO2 heterostructure films ...
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PEALD process parameters for SiO2:H…
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PEALD process parameters for SiO2:HfO2 heterostructure films ...
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5.: A simpliied schematic of a PEALD cycle. In contrast to an ALD ...
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5.: A simpliied schematic of a PEALD cycle. In c…
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5.: A simpliied schematic of a PEAL…
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5.: A simpliied schematic of a PEAL…
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The main parameters of the PEALD process | …
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Figure S2. Pulse/Purge sequence of the PEALD pro…
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a) PEALD process for In2O3, Ga2O3, and ZnO using DADI, TMGa, and DEZ ...
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a) PEALD process for In2O3, Ga2O3, and Zn…
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a) PEALD process for In2O3, Ga2O3, and Zn…
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3.: PEALD process for the deposition of amorphous aluminum nitride ...
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(a) Schematic of VHF (162 MHz) CCP- PEALD process chamber equipped with ...
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Scheme of the sequence of PEALD process with pulses …
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